1/28/2010	2:55:40 PM	Main Vac valve closed
1/28/2010	2:57:03 PM	Main Vac valve opened
1/28/2010	2:57:34 PM	Main Vac valve closed
1/28/2010	2:59:48 PM	Main Vac valve opened
1/28/2010	7:39:46 PM	Main Vac valve closed
1/28/2010	7:54:01 PM	Bypass valve opened
1/28/2010	7:54:18 PM	Main Vac valve opened
1/28/2010	7:55:54 PM	SiCl4 pre valve opened
1/28/2010	7:55:54 PM	SiCl4 pre valve closed
1/28/2010	7:55:55 PM	SiCl4 pre valve opened
1/28/2010	7:55:55 PM	SiCl4 pre valve closed
1/28/2010	7:57:00 PM	Helium valve opened
1/28/2010	7:58:40 PM	SiCl4 pre valve opened
1/28/2010	8:01:31 PM	Helium valve closed
1/28/2010	8:01:34 PM	SiCl4 pre valve closed
